Compact Scanning Electron Microscope (SEM)　 (Lemy series)

Emitter	Schottky (Zr/0/W)
Accelerating voltage	1kv – 15kv (Continuously variable)
Magnification	ｘ500,000
Column size	Height: 250mm, Diameter:100mm
Material analysis	EDS System (Option)
Evacuation	Dry system

 

(*) The chamber and specimen stage can be designed to meet the purpose.

 

Ion pump (LeIP-10)

Pumping speed	6,5 l/s
Pump size	67(W) x 63(D) x 130(H) mm
Inlet flange	DN40-CF
Weight	2.4 kg

Optical Microscope for Vacuum Chamber　(LeMS-10)

（Applying the patent）

– Capable to observe the irradiation point by charged particle – Bright view by illumination inside the chamber – Several 10s to 100s magnification (depend on specification)

Related part

– Test chip for electron beam evaluation

Design Tool

– Charged particle optics design tool (MEBS agent in Japan)